Amorphous to crystalline transition and optoelectronic properties of nanocrystalline indium tin oxide (ITO) films sputtered with high rf power at room temperature
IR@CECRI: CSIR-Central Electrochemical Research Institute, Karaikudi
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Title |
Amorphous to crystalline transition and optoelectronic properties of nanocrystalline indium tin oxide (ITO) films sputtered with high rf power at room temperature
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Creator |
Malathy, V.
Sivaranjani, S. Vidhya, V.S. Joseph Prince, J. Balasubramanian, T. Sanjeeviraja, C. Jayachandran, M. |
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Subject |
Electrochemical Materials Science
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Description |
ITO thin films were deposited on quartz substrates by the rf sputtering technique using various rf power
keeping the substrates at room temperature. The influence of rf power on the structural, electrical, optical
and morphological properties was studied by varying the rf power in the range 50–350 W. X-ray diffraction
results show an amorphous – crystalline transition with nano grains. At a power of 250 W, the ITO
film showed preferential orientation along (4 0 0) peak. It is observed from the optical transmission studies
that the optical band gap increased from 3.57 to 3.69 eV when the rf power was increased from 50 to
250 W. The resistivity value is minimum and grain size is maximum for the ITO film deposited at 250 W.
The X-ray photoelectron spectroscopy (XPS), Energy dispersive X-ray (EDX) and Atomic force microscopy
AFM results confirm that the ITO films are stoichiometric and the surface contained nano-sized grains
distributed uniformly all over the surface. It can be concluded that the ITO film deposited at room temperature
with 250Wrf power, can provide the required optical and electrical properties useful for developing
optoelectronic devices at lower temperatures.
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Publisher |
Elsevier
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Date |
2009
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Type |
Article
PeerReviewed |
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Format |
application/pdf
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Identifier |
http://cecri.csircentral.net/516/1/120-2009.pdf
Malathy, V. and Sivaranjani, S. and Vidhya, V.S. and Joseph Prince, J. and Balasubramanian, T. and Sanjeeviraja, C. and Jayachandran, M. (2009) Amorphous to crystalline transition and optoelectronic properties of nanocrystalline indium tin oxide (ITO) films sputtered with high rf power at room temperature. Journal of Non-Crystalline Solids, 355 (28-30). pp. 1508-1516. |
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Relation |
http://cecri.csircentral.net/516/
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