Design and development of a fully automated substrate rotation system (dwell time controller) for the deposition of multilayer coatings
IR@NAL: CSIR-National Aerospace Laboratories, Bangalore
View Archive Info| Field | Value | |
| Title |
Design and development of a fully automated substrate rotation system (dwell time controller) for the deposition of multilayer coatings
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| Creator |
Barshilia, Harish C
Rajam, KS Sudhakar, A Sankar, N |
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| Subject |
Physics(General)
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| Description |
In the deposition of multilayer coatings (say of A and B materials) thicknesses of individual layers are of the order of few angstroms. The thicknesses of the individual layers are determined by dwell time of substrate underneath each target. Typically the dwell time is of the order of few seconds depending upon the process conditions. Manual control of accurate dwell time is very difficult. More so, the repeatability of the individual layer thicknesses greatly affects properties of the multilayer coatings. In order to deposit multilayer coatings with controlled layer thicknesses and repeatability a PC based control system is designed and tested. This system consists of a driver circuit power supply and a stepper motor connected to the substrate holder through a rotary feedthrough. A user-friendly software is written in Visual Basic and Visual C++ for driving the stepper motor.
Keywords: Multilayer Coatings, Magnetron Sputtering, Dwell Time Controller, Visual Basic and Visual C++.
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| Publisher |
National Aerospace Laboratories
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| Date |
2001-07
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| Type |
Proj.Doc/Technical Report
NonPeerReviewed |
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| Identifier |
Barshilia, Harish C and Rajam, KS and Sudhakar, A and Sankar, N (2001) Design and development of a fully automated substrate rotation system (dwell time controller) for the deposition of multilayer coatings. Technical Report. National Aerospace Laboratories, National Aerospace Laboratories.
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| Relation |
http://nal-ir.nal.res.in/9859/
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