A Large Stroke Inverse Series Connected Electrothermal Bimorph Micromirror Platform for Optical Applications
IR@CEERI: CSIR-Central Electronics Engineering Research Institute, Pilani
View Archive Info| Field | Value | |
| Title |
A Large Stroke Inverse Series Connected Electrothermal Bimorph Micromirror Platform for Optical Applications
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| Creator |
Kumar, A
Bansal, D Kaur, M Rangra, K |
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| Subject |
MEMS and Microsensors
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| Description |
Abstract— This paper presents a large stroke surface micromachined iicro- min‘or platform actuated using inverse-series-connected (ISC) bimorph actua- tor. TI4e platform is capable of’ producing both piston and tip-tilt motion. With a mirror plate size of 500x500 pir 2, the maximum displacement is 100 qm in pis- toimode and 69 qm in tip-tilt mode at 0.2 V. The micromirror is capable of scanning with resonance trequencies at 4.31 KIdz and 6.70 KHz in piston and torsional mode respectively.
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| Date |
2019-12-02
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| Type |
Conference or Workshop Item
PeerReviewed |
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| Format |
application/pdf
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| Identifier |
http://ceeri.csircentral.net/342/1/32-2018.pdf
Kumar, A and Bansal, D and Kaur, M and Rangra, K (2019) A Large Stroke Inverse Series Connected Electrothermal Bimorph Micromirror Platform for Optical Applications. In: xix International Workshop on The Physics of sem. Devices, December 11-15, 2017, Delhi. (Submitted) |
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| Relation |
http://ceeri.csircentral.net/342/
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