Role of ZnO Piezoelectric Materials in the Development of MEMS Acoustic Sensor for High Sound Pressure Measurement
IR@CEERI: CSIR-Central Electronics Engineering Research Institute, Pilani
View Archive Info| Field | Value | |
| Title |
Role of ZnO Piezoelectric Materials in the Development of MEMS Acoustic Sensor for High Sound Pressure Measurement
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| Creator |
Prasad, M
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| Subject |
MEMS and Microsensors
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| Date |
2017
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| Type |
Conference or Workshop Item
PeerReviewed |
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| Format |
application/pdf
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| Identifier |
http://ceeri.csircentral.net/307/1/10-2017.pdf
Prasad, M (2017) Role of ZnO Piezoelectric Materials in the Development of MEMS Acoustic Sensor for High Sound Pressure Measurement. In: International Conference on Materials Research and Technology (ICMRT-2017), 10-11 July 2017, Ballabgarh. (Submitted) |
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| Relation |
http://ceeri.csircentral.net/307/
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