Correlation of sp3 and sp2 fraction of carbon with electrical, optical and nano-mechanical properties of argon-diluted diamond-like carbon films
IR@NPL: CSIR-National Physical Laboratory, New Delhi
View Archive Info| Field | Value | |
| Title |
Correlation of sp3 and sp2 fraction of carbon with electrical, optical and nano-mechanical properties of argon-diluted diamond-like carbon films
|
|
| Creator |
Dwivedi, Neeraj
Kumar, Sushil Malik, H. K. -, Govind Rauthan, C. M. S. Panwar, O. S. |
|
| Subject |
Physical Chemistry
Materials Science Applied Physics/Condensed Matter Physics |
|
| Description |
In the present work the correlation of electrical, optical and nano-mechanical properties of argon-diluted diamond-like carbon (Ar-DLC) thin films with sp3 and sp2 fractions of carbon have been explored. These Ar-DLC thin films have been deposited, under varying C2H2 gas pressures from 25 to 75 mTorr, by radio frequency-plasma enhanced chemical vapor deposition technique. X-ray photoelectron spectroscopy studies are performed to estimate the sp3 and sp2 fractions of carbon by deconvoluting C 1s core level spectra. Various electrical, optical and nano-mechanical parameters such as conductivity, I–V characteristics, optical band gap, stress, hardness, elastic modulus, plastic resistance parameter, elastic recovery and plastic deformation energy have been estimated and then correlated with calculated sp3 and sp2 fractions of carbon and sp3/sp2 ratios. Observed tremendous electrical, optical and nano-mechanical properties in Ar-DLC films deposited under high base pressure conditions made it a cost effective material for not only hard and protective coating applications but also for electronic and optoelectronic applications.
|
|
| Publisher |
Elsevier
|
|
| Date |
2011-02-26
|
|
| Type |
Article
PeerReviewed |
|
| Format |
application/pdf
|
|
| Identifier |
http://npl.csircentral.net/826/1/sp3.pdf
Dwivedi, Neeraj and Kumar, Sushil and Malik, H. K. and -, Govind and Rauthan, C. M. S. and Panwar, O. S. (2011) Correlation of sp3 and sp2 fraction of carbon with electrical, optical and nano-mechanical properties of argon-diluted diamond-like carbon films. Applied Surface Science, 257 (15). pp. 6804-6810. ISSN 0169-4332 |
|
| Relation |
http://dx.doi.org/10.1016/j.apsusc.2011.02.134
http://npl.csircentral.net/826/ |
|